REJE provides customized solutions and maintains extensive cooperation with industry-leading companies such as JEL and ASUZAC.
Product series adaptable to all process stages
JEL official partner, the exclusive designated agent and technical support service provider of JEL Japan in mainland China.
Provides a variety of specifications and models of atmospheric, vacuum, and waterproof Clean Robots, which can be customized according to customer needs. Meets the material handling needs of the semiconductor and general semiconductor industries.
Applicable wafer sizes: 12-inch / 8-inch Product dimensions: 2605x1300x2235mm
Applicable wafer size: 12 inches Product dimensions: 1595x1301.5x2000mm
Applicable wafer sizes: 8-inch/6-inch Product dimensions: 1350x1298.5x2000mm
Applicable to Taiko wafers with dimensions: 300mm, thickness: 75μm Product dimensions: 2800x980x1891.5mm
Edge-grip vacuum aligner for susceptor tray (compound semiconductors and Si wafers). High-speed and high-accuracy alignment is available.
Designed for aligning wafers in a production line or inspection line of semiconductor. Edge grip type aligner minimizes the wafer contact.
New type of aligner available for any material of wafer for 2, 3 inch, 100 to 150 mm waferl.
New type of aligner available for any material of wafer for 100 to 200 mm wafer
Environment:Clean room atmosphere Arm:Single arm Operating Range:553 mm (3rd joint center) Vertical Stroke:320 mm Payload Capacity:Below 4kg (calculated for the arm 3rd joint)
Environment:Clean room atmosphere Arm:Twin arm Operating Range:315mm (3rd joint center) Vertical Stroke:300mm / 400mm / 500mm Payload Capacity:4kg (calculated for the arm 3rd joint)
This robotic arm is based on the cylindrical coordinate Clean Robot, with the addition of a horizontal axis, with a maximum reach of 3000mm. The horizontal axis can be mounted on the bottom or side.
This robotic arm is based on the cylindrical coordinate Clean Robot, with the addition of a vertical axis and a horizontal axis. The vertical axis has a maximum stroke of 2000mm, and can be customized according to customer needs. This product has been used in large quantities by clients.
Frame Load Port Applicable wafer sizes: 12-inch/8-inch
Load Port Applicable wafer sizes: 12-inch/8-inch
SMIF Port Applicable wafer sizes: 8-inch/6-inch/5-inch
SMIF Port Applicable wafer size: MASK(RSP150)
Open Cassette Stage Applicable wafer sizes: 8-inch/6-inch/4-inch
Open Cassette Stage Applicable wafer sizes: 8-inch/6-inch
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