| Products | Sorter System
Intelligent and Clean, Process Self-driving
Wafer Sorter is a process equipment used in the semiconductor manufacturing industry. It ensures the cleanliness requirements of the wafer sorting process through the micro-environment inside the equipment, and realizes the offline control of wafers, pre-process batching, post-process merging, inter-process wafer sorting, product factory inspection, and sorting.
Core Technology
- Equipped with a Loadport with Info Pad function, which can realize the identification and control of FOSB and FOUP types.
- Equipped with REJE brand developed Wafer ID Reader module, with ultra-high reading speed and recognition accuracy above 99.9%.
- Corresponding to E84, it can communicate with EAP through SECS/GEM; equipped with Aligner, which can realize wafer positioning function, and wafers can be adjusted on demand.
- The ion bar inside the equipment can eliminate static electricity on the wafer surface.
- Industrial control computer + Windows system.
- High domestication rate of core parts, the whole machine adopts modular design, provides a variety of optional functional configurations, and quickly responds to customer needs.
- It can be connected to various process equipment of different types, and can be deeply customized according to process needs.a
Sorter Equipment
RJST10900
Applicable wafer sizes: 12-inch / 8-inch Product dimensions: 2605x1300x2235mm
Configuration: RFID, industrial control unit components, Wafer ID Reader, safety light curtain
RJST10400
Applicable wafer size: 12 inches Product dimensions: 1595x1301.5x2000mm
Configuration: Robot Mapping, RFID, Industrial PC components, Wafer ID Reader, E84, FOSB Detection, Safety Light Curtain
RJST10500
Applicable wafer sizes: 8-inch/6-inch Product dimensions: 1350x1298.5x2000mm
Configuration: RFID, industrial control unit components, Wafer ID Reader, safety light curtain
Taiko Sorter
Applicable to Taiko wafers with dimensions: 300mm, thickness: 75μm Product dimensions: 2800x980x1891.5mm
Configuration: FLIP, RFID, industrial control unit components, Wafer ID Reader, E84, Info pad sensor, safety light curtain
Links