Premium Parts
Focus on high-end, reliable, and sophisticated technology products to solve problems encountered in technology research and development, and improve the quality and productivity of complex industrial processes. Customized solutions and designs for new materials, instruments and mechanical equipment to meet different process needs and continuously enrich the categories that can meet market demand.
Maintain innovation and flexibility, and win customer trust with advanced technical support and perfect customer service.
Semiconductor Equipment Parts
High-quality Customized Solutions
Precision Ceramics
Fabricated from refined synthetic materials like alumina and silicon carbide, delivering outstanding wear resistance, insulation, heat resistance, corrosion resistance and electrical conductivity.
Bionic Anti-Friction Pad
High horizontal friction, no pop-out, contamination-free.Made of self-developed semiconductor compliant materials for semiconductor & display substrate sectors.
Heater
New integrated process enables easy mounting & removal, convenient maintenance and superior operability.
Metal Heater
Provides uniform high-temperature vacuum heating for 4–12 inch silicon wafers, with custom options for substrate brackets, heating trays and more.
TC Wafer
Adopting new integrated craftsmanship, it enables easy heater mounting & removal, convenient maintenance and great operability.
O Ring
High temperature resistant, pressure resistant, and plasma resistant.
Mechanical Position Retention Spring
Custom balancing structure designed for cleanroom applications.
Sensors
For semiconductor & electronics sectors; controls all types of pressure, vacuum pressure and forming loads.
Electrostatic Chuck
Stable adsorption via Coulomb force & Johnson-Rahbek effect, engineered to fix ultra-thin fragile wafers unmanageable by conventional jigs.
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