Load Port
REJE offers a complete portfolio of port solutions: Load Port, SMIF Port, Frame Load Port, and Open Cassette Stage.
REJE independently developed automated loading and unloading system for semiconductor wafers, featuring small footprint and high automation level,can effectively improveproduction line efficiency and reduce production costs.
FOUP Load Port
Load Port is designed to enable automatic loading and unloading of 8-inch and 12-inch wafers, ensuring wafer cleanliness throughout the manufacturing process. It interfaces with automated transportation systems such as AGVs and OHTs to enable automated transfer of wafer pods. The system is widely used with semiconductor process equipment, including lithography, etching, CVD, PVD, cleaning, inspection, and metrology.
SMIF Port
Used in semiconductor chip manufacturing production lines to realize automatic opening and closing of SMIF PODs, preventing wafer contamination, replacing manual loading and handling, connecting to OHT overhead crane systems to realize automatic loading, unloading and handling functions, meeting the automated production needs of Fab plants.
Load Port Features
- Mapping can detect wafer presence, stacking, and tilting.
- It can be equipped with loading units that meet SEMI standards, such as FOUP, FOSB, and conversion platform + Cassette.
- Equipped with carrier automatic identification function.
- Optional RFID reader.
- TCP/IP communication method.
- Optional SECS/GEM interface.
- Door holding uses vacuum adsorption method.
- With anti-pinch function.
- Operation cycle opening operation: 20s (including Mapping operation), closing operation 10s (excluding Mapping operation).
SMIF Port Features
- SMIF Port is used to place and switch 125mm, 150mm, 200mm wafer SMIF Pods. The opening method is top opening.
- Compliant with SEMI E63 standard, box switching time: Open Pod≤15s; Close Pod≤15s.
- Using a single system mini-environment to isolate the wafer during transportation and prevent wafer contamination.
- Replace manual loading and unloading, can be interfaced with OHT overhead crane system to realize automatic loading and unloading, and meet the needs of automated production in Fab factories.
- It can realize the detection of the presence or absence of SMIF Pod, wafer and Cassette, and can also detect the convexity, obliqueness and thickness of the wafer.
- Automatic identification of Cassette size and Cassette status detection function.
- Optional RFID read-write unit (supports RS232 or Ethernet communication).
- Can store 80 kinds of wafer MAP recipe parameters.
RJLP500
Open Cassette Stage Applicable wafer sizes: 8-inch/6-inch
Product dimensions: 470x390x1348mm Configuration: E63 interface, wafer die detection, wafer size detection
RJLP10200
Open Cassette Stage Applicable wafer sizes: 8-inch/6-inch/4-inch
Product dimensions: 470x390x1348mm Configuration: E63 interface, wafer die detection, wafer size detection
RJLP11200
SMIF Port Applicable wafer size: MASK(RSP150)
Product dimensions: 472x412x1347mm Configuration: RFID, E84, MASK Mapping, Carrier Present
RJLP10800
SMIF Port Applicable wafer sizes: 8-inch/6-inch/5-inch
Product dimensions: 472x412x1347mm Configuration: RFID, E84, Wafer Mapping, Wafer, Protrusion, Bevel/Stack identification function
RJLP300
Load Port Applicable wafer sizes: 12-inch/8-inch
Product dimensions: 472x564.5x1348mm Configuration: RFID, E84, Mapping, Fly out
Frame Load Port
Frame Load Port Applicable wafer sizes: 12-inch/8-inch
Product dimensions: 472x598.5x1348mm Configuration: RFID, E84, Mapping, Fly out
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