REJE offers customized solutions and collaborates extensively with leading industry players such as JEL and ASUZAC.
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SVAL3001
(Vacuum Aligner)Wafer Aligner
Edge-grip vacuum aligner for susceptor tray (compound semiconductors and Si wafers).
High-speed and high-accuracy alignment is available.
Product Features
Environment:Vacuum area (Temp. 15°C to 50°C)
Wafer Size:100 to 300mm, others
Carrying Object:silicon wafer, susceptor
Product Details
- Payload capacity: Below 4kg
- Stand-alone aligner using vacuum resistance sensor (Set the controller in the atmospheric environment.)
- Vacuum sealing: Magnetic fluid sealing and bellows are used.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- Index function: Rotate according to the wafer position in the tray.
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