REJE offers customized solutions and cooperates extensively with leading industry players like JEL and ASUZAC.
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SCR3160CSN
3-Axis Cylindrical Coordinate Clean Robot (Closed-loop control)
Environment:Clean room atmosphere
Arm:Single arm
Operating Range:340mm (3rd joint center)
Vertical Stroke:200mm / 300mm / 400mm / 450mm / 500mm
Payload Capacity:3kg (calculated for the arm 3rd joint)
Product Features
New type of 3-axis cylindrical coordinate type single-arm clean robot.
For handling wafers from 2 inch to 300mm with low-cost, high-speed handling, and no step-out error.
Product Details
- High reliability: Closed-loop control achieves no step-out error under rapid load change or acceleration.
- Reduced origin search time: By absolute encoder
- Equipped with the batteryless multi-rotation absolute sensor
- Robot replacement is available: Compatible with conventional model (installation/performance)
- High rigidity: Payload capacity of 3kg (calculated for the arm 3rd joint/including wrist-block, end-effector, and wafer)
- Arm lineup: 100mm, 130mm, 160mm, 200mm
- Base or flange mounting type is selectable according to the customer’s system layout.
- Bernoulli end-effector is available (option)
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