REJE offers customized solutions and collaborates extensively with leading industry players such as JEL and ASUZAC.
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GTFR5280
5-Axis Horizontal and Multi-Joint Type Clean Robot (For 300 mm wafer)
Environment:Clean room atmosphere
Arm:Single arm
Operating Range:553 mm (3rd joint center)
Vertical Stroke:320 mm
Payload Capacity:Below 4kg (calculated for the arm 3rd joint)
Product Features
5-Axis horizontal and multi-joint type clean robot for 300 mm wafer.
A twin end-effector mounted on its single-arm has the same function as a twin-arm robot.
Designed for handling wafers in EFEM.
Compared to our conventional GTCR model, the cycle time is improved by reducing the operation prohibited area and the influence of speed limit.
Suitable for internal use in 300mm semiconductor production equipment, and applicable to wafer handling for EFEM.
Product Details
- 3 FOUP access is available without a track.
- Twin end-effector reduces the wafer swap time.
- AC servo motors with absolute encoders installed in all axes. (Batteryless)
- Wafer holding: end-effector with vacuum suction, passive edge, edge grip.
- Optimal end-effector is selectable according to the carrying object and line layout.
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