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KHR3480-290-AM
Direct-arm type clean robot
In an atmospheric environment, transporting 25 300mm wafers at one time.
Product Features
It can transfer 25 wafers at a time, significantly reducing transfer time.
Equipped with a rotating shaft, it can be adapted to multiple cassette layouts.
Product Details
- Control Communication Method: RS232C
- Finger Material: High-Purity Ceramic
- Wafer Fixing Method: Bottom-up, Edge Clamping
- All axes use AC servo motors with absolute encoders, eliminating the need for batteries.
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