REJE offers customized solutions and collaborates extensively with leading industry players such as JEL and ASUZAC.
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SVCR3330S
3-Axis Cylindrical Coordinate Clean Robot (Handling susceptor/tray)
Environment Vacuum (Temp. 15°C to 50°C)
Driving unit:Clean room atmosphere (Temp. 15°C to 40°C)
Arm:Single arm
Operating Range:640mm (3rd joint center)
Vertical Stroke:60mm
Payload Capacity:10kg (calculated for the arm 3rd joint)
Product Features
Designed for handling susceptor tray up to 4kg with shuttle type twin end-effector in the vacuum chamber of production line and inspection line.
Cost performance is superior compared to LVHR series.
Product Details
- Magnetic fluid sealing is used for arm joint.
- Vacuum sealing: Magnetic fluid sealing and bellows are used.
- For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- Servo motor type is available.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with passive edge or edge grip type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
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