REJE offers customized solutions and collaborates extensively with leading industry players such as JEL and ASUZAC.
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SWCR3160CS
3-axis cylindrical coordinate Clean Robot (waterproof)
Environment:Clean room atmosphere
Arm:Single arm
Operating Range:312mm (3rd joint center)
Vertical Stroke:200mm / 300mm
Payload Capacity:Below 3kg (calculated for the arm 3rd joint)
Product Features
Designed for handling 300mm wafers in a LSI production line under the condition of acid or alkaline mist (IP64).
Flip and edge grip functions are available.
Product Details
- Corrosion protection for arm by Teflon coating
- V-type seals are used for waterproof of arm joint.
- Viton seals are used for parts joint.
- Bellows are used for waterproof of vertical axis.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, or edge grip type End-effector.
- Optimal end-effector is selectable according to the carrying object and line layout.
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