REJE offers customized solutions and collaborates extensively with leading industry players such as JEL and ASUZAC.
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FTVHR4750
4-axis cylindrical coordinate Clean Robot (linkage vacuum/glass substrate)
4-axis cylindrical coordinate linkage-type vacuum Clean Robot FTVHR4000 series for transporting photomask glass substrates. Suitable for transporting photomask glass substrates within liquid crystal display panel production equipment and inspection equipment.
Product Features
Operating environment: Cleanroom atmosphere: Temperature 15°C-40°C; Process room temperature below 15°C-50°C
Arms: Dual arms
Reach: 942mm (based on the center of the 3rd arm joint)
Vertical stroke: 95mm / 105mm / 335mm
Product Details
- Standard arm length of the robotic arm: 550mm, 750mm, 800mm, 820mm
- Payload: Less than 30kg based on the 3rd joint of the arm (550mm, 750mm, 820mm)
- Less than 40kg based on the 3rd joint of the arm (800mm)
- The adoption of a linkage mechanism achieves a better linear motion trajectory and improves the cleanliness of the equipment
- The dual-arm structure can shorten the arm movement time when replacing the substrate
- Equipped with a motion monitor
- Control communication method: RS232C and parallel port I/O
- All axes use AC servo motors with absolute value encoder specifications
- S-curve acceleration and deceleration control allows for high-speed and high-precision handling of glass substrates
- Finger material: CFRP (carbon fiber), aluminum alloy, high-purity ceramic, and other optional materials
- Optimal fingers can be provided according to the type of object being handled, equipment layout, and other requirements
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