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  • LHR3400C(1765770762155).png

LHR3400C

3-axis cylindrical coordinate Clean Robot (glass substrate)

LHR3000 series 3-axis cylindrical coordinate cleaning robot arm supporting glass circuit boards. Suitable for handling glass circuit boards in liquid crystal manufacturing equipment, inspection equipment, etc. Z-axis with a Z-stroke of over 760mm adopts a multi-stage design, thus enabling a low wafer pick-up position.

Product Features

Clean Robot Usage Environment: Cleanroom atmospheric environment: Temperature 15°C-40°C Arm: Single arm Reach: 1550mm (center of transported object) Vertical stroke: 400mm / 500mm / 600mm / 760mm / 900mm / 1500mm Payload: 15kg (based on the 3rd joint of the arm)

Product Details

  • Standard arm length of the robotic arm: 400mm, 500mm, 700mm
  • Standard length of Z-axis (lifting axis): 400mm, 500mm, 600mm, 760mm, 900mm, 1500mm 
    (Z-axis 400mm, 500mm, 600mm are single-stage, the actual product may differ from the picture)
  • Handling capacity: 15kg or less at the base of the 3rd joint of the arm (400mm, 500mm)
  • 40kg or less at the base of the 3rd joint of the arm (700mm)
  • Base mounting or flange mounting can be selected to meet equipment needs
  • Equipped with a motion monitor
  • Control communication methods: RS232C and parallel I/O
  • All axes use AC servo motors with absolute value encoder specifications
  • S-curve acceleration and deceleration control allows for high-speed and high-precision handling of glass substrates
  • Substrate fixing methods: Vacuum suction, bottom support, edge clamping, Bernoulli non-contact
  • Finger materials: CFRP (carbon fiber), aluminum alloy, high-purity ceramic, and other optional materials
  • Various sensors can be installed on the fingers (calibration, presence/absence, mapping, etc.)
  • Optimal fingers can be provided based on the type of object being handled, equipment layout, and other requirements

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