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LTHR4400C
4-axis cylindrical coordinate Clean Robot (glass substrate)
The 4-axis cylindrical coordinate Clean Robot LTHR4000 series is designed for handling glass substrates. Suitable for handling glass substrates within LCD panel production equipment and inspection equipment. The Z-axis lifting range exceeding 760mm is multi-stage, effectively reducing the handling height.
Product Features
Vacuum Clean Robot
Usage Environment: Cleanroom atmospheric environment: Temperature 15°C-40°C; Vacuum process chamber temperature: 15°C-50°C
Arms: Dual arms
Reach: 1550mm (distance to the center of the object being conveyed)
Maximum stroke of lifting axis: 400mm / 500mm / 600mm / 760mm / 900mm
Payload: 15kg (based on the 3rd joint of the arm)
Product Details
- Standard arm length of the robotic arm: 400mm, 500mm
- Standard length of Z-axis (vertical axis): 400mm, 500mm, 600mm, 760mm, 900mm (Z-axis exceeding 760mm is multi-stage, the appearance of the actual product and the photo will be different).
- Payload: 15kg or less at the base of the 3rd joint of the arm (400mm, 500mm)
- The dual-arm structure can shorten the arm movement time when changing the substrate.
- According to equipment needs, the base can be fixed or flange-mounted.
- Equipped with a motion monitor.
- Control communication method: RS232C and parallel I/O
- All axes use absolute value encoder specification AC servo motors with S-curve acceleration and deceleration control, enabling high-speed and high-precision handling of glass substrates.
- Substrate fixing method: Vacuum suction, bottom support, edge clamping, Bernoulli non-contact
- Finger material: CFRP (carbon fiber), aluminum alloy, high-purity ceramic and other optional materials
- Various sensors can be installed on the fingers (calibration, presence/absence, mapping, etc.).
- Optimal fingers can be provided according to the type of object to be handled, equipment layout, and other requirements.
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