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MTCR4160
(For small wafer)3-Axis Cylindrical Coordinate Clean Robot
Environment:Clean room atmosphere
Arm:Twin arm
Operating Range:315mm (3rd joint center)
Vertical Stroke:300mm / 400mm / 500mm
Payload Capacity:4kg (calculated for the arm 3rd joint)
Product Features
Designed for handling 300mm wafers in a production line or inspection line of semiconductor.
High-speed handling by AC servo motor and superior cost performance compared to MTHR type.
Certified CE marking.
Execution of origin search is not required by using the servo motors with absolute encoders.
Product Details
- Arm lineup: 160mm, 200mm
- Twin-arm reduces the wafer swap time.
- Base or flange mounting type is selectable.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- AC servo motor installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
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