Product series adaptable to all process stages
JEL official partner, the exclusive designated agent and technical support service provider of JEL Japan in mainland China.
Provides a variety of specifications and models of atmospheric, vacuum, and waterproof Clean Robots, which can be customized according to customer needs. Meets the material handling needs of the semiconductor and general semiconductor industries.
Environment:Clean room atmosphere (Temp. 15°C to 40°C);Process chamber (Max. Temp. 450°C) Arm:Single arm Operating Range:635mm (3rd joint center) Vertical Stroke:60mm Payload Capacity:Below 4kg (calculated for the arm 3rd joint)
Environment:Clean room atmosphere Arm:Single arm Operating Range:1290 mm (robot center to substrate center) Vertical Stroke:60 mm Payload Capacity:10 kg
Environment:Vacuum (Temp. 15°C to 50°C) Driving unit:lean room atmosphere (Temp. 15°C to 40°C) Arm:Single arm Operating Range:520mm (3rd joint center) Vertical Stroke:20mm / 40mm Payload Capacity:2kg (calculated for the arm 3rd joint)
Environment Vacuum (Temp. 15°C to 50°C) Driving unit:Clean room atmosphere (Temp. 15°C to 40°C) Arm:Single arm Operating Range:640mm (3rd joint center) Vertical Stroke:60mm Payload Capacity:10kg (calculated for the arm 3rd joint)
Environment: Clean room atmosphere Arm: Twin-arm Operating Range: 310mm (3rd joint center) Vertical Stroke: 50mm Payload Capacity: 2kg (calculated for the arm 3rd joint)
