Wafer Robot
Environment: Atmosphere, Vacuum, Waterproof —— Carrying Object: 2", 3", 100mm, 125mm, 150mm, 200mm, 300mm

REJE provides customized solutions and maintains extensive cooperation with industry-leading companies such as JEL and ASUZAC.

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Product series adaptable to all process stages

JEL official partner, the exclusive designated agent and technical support service provider of JEL Japan in mainland China.

Provides a variety of specifications and models of atmospheric, vacuum, and waterproof Clean Robots, which can be customized according to customer needs. Meets the material handling needs of the semiconductor and general semiconductor industries.

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Arm
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清空条件

LVHR3440S

The LVHR3000 series of 3-axis cylindrical coordinate vacuum clean robots are designed for handling glass substrates. Suitable for use within LCD panel production equipment and inspection equipment for glass substrate handling.

LTHR4400C

The 4-axis cylindrical coordinate Clean Robot LTHR4000 series is designed for handling glass substrates. Suitable for handling glass substrates within LCD panel production equipment and inspection equipment. The Z-axis lifting range exceeding 760mm is multi-stage, effectively reducing the handling height.

LHR3400C

LHR3000 series 3-axis cylindrical coordinate cleaning robot arm supporting glass circuit boards. Suitable for handling glass circuit boards in liquid crystal manufacturing equipment, inspection equipment, etc. Z-axis with a Z-stroke of over 760mm adopts a multi-stage design, thus enabling a low wafer pick-up position.

FTVHR4750

4-axis cylindrical coordinate linkage-type vacuum Clean Robot FTVHR4000 series for transporting photomask glass substrates. Suitable for transporting photomask glass substrates within liquid crystal display panel production equipment and inspection equipment.

JCR4400

Environment:Clean room atmosphere Arm:Single arm Operating Range:1290 mm (robot center to substrate center) Vertical Stroke:400 mm Payload Capacity:10 kg (calculated for the arm 3rd joint)

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