Product series adaptable to all process stages
JEL official partner, the exclusive designated agent and technical support service provider of JEL Japan in mainland China.
Provides a variety of specifications and models of atmospheric, vacuum, and waterproof Clean Robots, which can be customized according to customer needs. Meets the material handling needs of the semiconductor and general semiconductor industries.
Environment:Clean room atmosphere Arm:Single arm Operating Range:553 mm (3rd joint center) Vertical Stroke:320 mm Payload Capacity:Below 4kg (calculated for the arm 3rd joint)
Environment:Clean room atmosphere Arm:Twin arm Operating Range:315mm (3rd joint center) Vertical Stroke:300mm / 400mm / 500mm Payload Capacity:4kg (calculated for the arm 3rd joint)
This robotic arm is based on the cylindrical coordinate Clean Robot, with the addition of a horizontal axis, with a maximum reach of 3000mm. The horizontal axis can be mounted on the bottom or side.
This robotic arm is based on the cylindrical coordinate Clean Robot, with the addition of a vertical axis and a horizontal axis. The vertical axis has a maximum stroke of 2000mm, and can be customized according to customer needs. This product has been used in large quantities by clients.
Can be used in sterile rooms and clean rooms in medical and biochemical facilities
The LVHR3000 series of 3-axis cylindrical coordinate vacuum clean robots are designed for handling glass substrates. Suitable for use within LCD panel production equipment and inspection equipment for glass substrate handling.
The 4-axis cylindrical coordinate Clean Robot LTHR4000 series is designed for handling glass substrates. Suitable for handling glass substrates within LCD panel production equipment and inspection equipment. The Z-axis lifting range exceeding 760mm is multi-stage, effectively reducing the handling height.
LHR3000 series 3-axis cylindrical coordinate cleaning robot arm supporting glass circuit boards. Suitable for handling glass circuit boards in liquid crystal manufacturing equipment, inspection equipment, etc. Z-axis with a Z-stroke of over 760mm adopts a multi-stage design, thus enabling a low wafer pick-up position.
4-axis cylindrical coordinate linkage-type vacuum Clean Robot FTVHR4000 series for transporting photomask glass substrates. Suitable for transporting photomask glass substrates within liquid crystal display panel production equipment and inspection equipment.
Environment:Clean room atmosphere Arm:Single arm Operating Range:1290 mm (robot center to substrate center) Vertical Stroke:400 mm Payload Capacity:10 kg (calculated for the arm 3rd joint)
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Environment:Clean room atmosphere Arm:Single arm Operating Range:312mm (3rd joint center) Vertical Stroke:200mm / 300mm Payload Capacity:Below 3kg (calculated for the arm 3rd joint)
Environment:Clean room atmosphere (Temp. 15°C to 40°C);Process chamber (Max. Temp. 450°C) Arm:Single arm Operating Range:635mm (3rd joint center) Vertical Stroke:60mm Payload Capacity:Below 4kg (calculated for the arm 3rd joint)
Environment:Clean room atmosphere Arm:Single arm Operating Range:1290 mm (robot center to substrate center) Vertical Stroke:60 mm Payload Capacity:10 kg
Environment:Vacuum (Temp. 15°C to 50°C) Driving unit:lean room atmosphere (Temp. 15°C to 40°C) Arm:Single arm Operating Range:520mm (3rd joint center) Vertical Stroke:20mm / 40mm Payload Capacity:2kg (calculated for the arm 3rd joint)
Environment Vacuum (Temp. 15°C to 50°C) Driving unit:Clean room atmosphere (Temp. 15°C to 40°C) Arm:Single arm Operating Range:640mm (3rd joint center) Vertical Stroke:60mm Payload Capacity:10kg (calculated for the arm 3rd joint)
Environment: Clean room atmosphere Arm: Twin-arm Operating Range: 310mm (3rd joint center) Vertical Stroke: 50mm Payload Capacity: 2kg (calculated for the arm 3rd joint)
Environment:Clean room atmosphere Arm:Single arm Operating Range:400mm (3rd joint center) Vertical Stroke:300mm / 400mm / 500mm Payload Capacity:4kg (calculated for the arm 3rd joint)
